Methods and systems for managing semiconductor manufacturing equipment
Provided are methods and systems for managing semiconductor manufacturing equipment. A method may include preventive maintenance involving steps of disassembling, cleaning, and assembling parts of a chamber. The assembling of the parts may include checking whether the parts are correctly assembled,...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
16.01.2018
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Subjects | |
Online Access | Get full text |
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Summary: | Provided are methods and systems for managing semiconductor manufacturing equipment. A method may include preventive maintenance involving steps of disassembling, cleaning, and assembling parts of a chamber. The assembling of the parts may include checking whether the parts are correctly assembled, using reflectance and absorptivity of a high-frequency voltage applied to the parts. |
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Bibliography: | Application Number: US201514631083 |