Lithographic apparatus and device manufacturing method
A lithographic apparatus includes a reflector to redirect a radiation beam, e.g. an EUV beam. The position of the reflector is controlled using a controller and a positioning system. The positioning system includes a non-compensating actuator device and a compensating actuator device to compensate f...
Saved in:
Main Authors | , , |
---|---|
Format | Patent |
Language | English |
Published |
02.01.2018
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | A lithographic apparatus includes a reflector to redirect a radiation beam, e.g. an EUV beam. The position of the reflector is controlled using a controller and a positioning system. The positioning system includes a non-compensating actuator device and a compensating actuator device to compensate for parasitic forces of the non-compensating actuator device. The positioning system and controller can provide a more accurate position of the reflector, reduce deformation of the reflector and reduce the magnitude of forces transmitting through the reflector. |
---|---|
Bibliography: | Application Number: US201515303478 |