Method of manufacturing semiconductor device

• Main Authors: Cho Kyung-In, Jang Cheol-Jon, Song Ji-Ho, Jang Myung-Soo, Chong Jong-Wha, Kim Jae-Hwan
• Format: Patent
• Language: English
• Published: 26.12.2017
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PHYSICS; SEMICONDUCTOR DEVICES

A method for manufacturing a semiconductor device can reduce congestion across wires while reducing a wire length. The method includes determining a first TSV candidate region in a first die and determining a second TSV candidate region in a second die parallel to the first die. The method also incl...