Resonance apparatus for processing electrical loss using conductive material and method for manufacturing the same

A resonance apparatus that processes an electrical loss using a conductive material and a method of manufacturing the resonance apparatus are provided. The resonance apparatus includes a lower electrode formed at a predetermined distance from a substrate, and a piezoelectric layer formed on the lowe...

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Bibliographic Details
Main Authors Shin Jeashik, Kim Duck Hwan, Song In Sang, Kim Chul Soo, Son Sang Uk, Lee Moonchul, Park Hosoo
Format Patent
LanguageEnglish
Published 12.12.2017
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:A resonance apparatus that processes an electrical loss using a conductive material and a method of manufacturing the resonance apparatus are provided. The resonance apparatus includes a lower electrode formed at a predetermined distance from a substrate, and a piezoelectric layer formed on the lower electrode. The resonance apparatus further includes an upper electrode formed on the piezoelectric layer, and a conductive layer formed on the upper electrode or the lower electrode.
Bibliography:Application Number: US201313934835