Resonance apparatus for processing electrical loss using conductive material and method for manufacturing the same
A resonance apparatus that processes an electrical loss using a conductive material and a method of manufacturing the resonance apparatus are provided. The resonance apparatus includes a lower electrode formed at a predetermined distance from a substrate, and a piezoelectric layer formed on the lowe...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
12.12.2017
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Subjects | |
Online Access | Get full text |
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Summary: | A resonance apparatus that processes an electrical loss using a conductive material and a method of manufacturing the resonance apparatus are provided. The resonance apparatus includes a lower electrode formed at a predetermined distance from a substrate, and a piezoelectric layer formed on the lower electrode. The resonance apparatus further includes an upper electrode formed on the piezoelectric layer, and a conductive layer formed on the upper electrode or the lower electrode. |
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Bibliography: | Application Number: US201313934835 |