Charged particle beam apparatus, specimen observation system and operation program

An image display device displays operation items of an electron microscope on an operation screen, and a storage device stores information of assist buttons which display image state information acquired via a detector of the electron microscope. The information of the assist buttons corresponds to...

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Bibliographic Details
Main Authors Tamochi Ryuichiro, Noda Hiroyuki, Iizumi Noriko, Sato Mitsugu, Shigeto Kunji, Inada Takahiro, Konishi Yayoi, Ando Tohru
Format Patent
LanguageEnglish
Published 17.10.2017
Subjects
ADVERTISING
APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND,DEAF OR MUTE
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
CRYPTOGRAPHY
DIAGRAMS
DISPLAY
EDUCATION
EDUCATIONAL OR DEMONSTRATION APPLIANCES
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
GLOBES
PHYSICS
PLANETARIA
SEALS
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Summary:An image display device displays operation items of an electron microscope on an operation screen, and a storage device stores information of assist buttons which display image state information acquired via a detector of the electron microscope. The information of the assist buttons corresponds to image quality of an acquired image via the detector as well as to observation conditions composed of a combination of parameter setting values of the electron microscope, an operation program which analyzes the image quality of the acquired image. The information of the assist buttons is acquired based on analytical results of the image quality as well as current observation conditions, and the assist buttons are displayed on a predetermined part of the operation screen. Accordingly, the skills of a novice user operating a charged particle beam apparatus can be improved.
Bibliography:Application Number: US201314385239