Interconnect structures with variable dopant levels
Interconnect structures and related methods of manufacture improve device reliability and performance by selectively incorporating dopants into conductive lines. Multiple seed layer deposition steps or variable trench bottom areas are used to locally control the dopant concentration within the inter...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
19.09.2017
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Subjects | |
Online Access | Get full text |
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Summary: | Interconnect structures and related methods of manufacture improve device reliability and performance by selectively incorporating dopants into conductive lines. Multiple seed layer deposition steps or variable trench bottom areas are used to locally control the dopant concentration within the interconnect structures at the same wiring level, which provides a robust integration approach for metallizing interconnects in future-generation technology nodes. |
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Bibliography: | Application Number: US201615203084 |