Process for the preparation of hexachlorodisilane by cleavage of higher polychlorosilanes such as octachlorotrisilane
The invention relates to a process for converting polychlorosilanes into hexachlorodisilane, by one or more trimeric polychlorosilanes or a trimeric polychlorosilane in a mixture with higher molecular weight polychlorosilanes being exposed to a gas discharge and hexachlorodisilane being formed and i...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
12.09.2017
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Subjects | |
Online Access | Get full text |
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Summary: | The invention relates to a process for converting polychlorosilanes into hexachlorodisilane, by one or more trimeric polychlorosilanes or a trimeric polychlorosilane in a mixture with higher molecular weight polychlorosilanes being exposed to a gas discharge and hexachlorodisilane being formed and isolated. |
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Bibliography: | Application Number: US201414782433 |