Process for the preparation of hexachlorodisilane by cleavage of higher polychlorosilanes such as octachlorotrisilane

The invention relates to a process for converting polychlorosilanes into hexachlorodisilane, by one or more trimeric polychlorosilanes or a trimeric polychlorosilane in a mixture with higher molecular weight polychlorosilanes being exposed to a gas discharge and hexachlorodisilane being formed and i...

Full description

Saved in:
Bibliographic Details
Main Authors Mueh Ekkehard, Rauleder Hartwig, Lang Juergen Erwin
Format Patent
LanguageEnglish
Published 12.09.2017
Subjects
Online AccessGet full text

Cover

Loading…
More Information
Summary:The invention relates to a process for converting polychlorosilanes into hexachlorodisilane, by one or more trimeric polychlorosilanes or a trimeric polychlorosilane in a mixture with higher molecular weight polychlorosilanes being exposed to a gas discharge and hexachlorodisilane being formed and isolated.
Bibliography:Application Number: US201414782433