Back-end electrically programmable fuse

A BEOL e-fuse is disclosed which reliably blows in the via and can be formed even in the tightest pitch BEOL layers. The BEOL e-fuse can be formed utilizing a line first dual damascene process to create a sub-lithographic via to be the programmable link of the e-fuse. The sub-lithographic via can be...

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Bibliographic Details
Main Authors Moy Dan, Bonilla Griselda, Choi Samuel S, Filippi Ronald, Lustig Naftali E, Bao Junjing, Simon Andrew H, Grunow Stephan, Chanda Kaushik
Format Patent
LanguageEnglish
Published 20.06.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
RELAYS
SELECTORS
SEMICONDUCTOR DEVICES
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Summary:A BEOL e-fuse is disclosed which reliably blows in the via and can be formed even in the tightest pitch BEOL layers. The BEOL e-fuse can be formed utilizing a line first dual damascene process to create a sub-lithographic via to be the programmable link of the e-fuse. The sub-lithographic via can be patterned using standard lithography and the cross section of the via can be tuned to match the target programming current.
Bibliography:Application Number: US201213348011