Strain-enhanced transistors with adjustable layouts

• Main Authors: McElheny Peter J, Richter Fangyun, Venkitachalam Girish, Hsu Che Ta
• Format: Patent
• Language: English
• Published: 25.04.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A transistor may include a semiconductor region such as a rectangular doped silicon well. Gate fingers may overlap the silicon well. The gate fingers may be formed from polysilicon and may be spaced apart from each other along the length of the well by a fixed gate-to-gate spacing. The edges of the well may be surrounded by field oxide. Epitaxial regions may be formed in the well to produce compressive or tensile stress in channel regions that lie under the gate fingers. The epitaxial regions may form source-drain terminals. The edges of the field oxide may be separated from the nearest gate finger edges by a distance that is adjusted automatically with a computer-aided-design tool and that may be larger than the gate-to-gate spacing. Dummy gate finger structures may be provided to ensure desired levels of stress are produced.