Endpoint determination for capillary-assisted flow control

Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The...

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Bibliographic Details
Main Authors Wodjenski Michael J, Avila Anthony M, Despres Joseph R, Baum Thomas H, Sweeney Joseph D
Format Patent
LanguageEnglish
Published 25.04.2017
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
CONTROLLING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
PHYSICS
PIPE-LINE SYSTEMS
PIPE-LINES
REGULATING
SEMICONDUCTOR DEVICES
STORING OF DISTRIBUTING GASES OR LIQUIDS
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
WEAPONS
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Summary:Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluid-utilizing apparatus such as ion implanters.
Bibliography:Application Number: US201514796723