High efficiency high accuracy heater driver
A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temper...
Saved in:
Main Authors | , |
---|---|
Format | Patent |
Language | English |
Published |
04.04.2017
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Be the first to leave a comment!