High efficiency high accuracy heater driver

A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temper...

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Bibliographic Details
Main Authors Serebryanov Oleg V, Goldin Alexander
Format Patent
LanguageEnglish
Published 04.04.2017
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
DETAILS OF DOMESTIC STOVES OR RANGES, OF GENERAL APPLICATION
DRYING
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
OTHER DOMESTIC STOVES OR RANGES
RANGES
SEMICONDUCTOR DEVICES
VENTILATING
WEAPONS
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Summary:A thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.
Bibliography:Application Number: US201314013151