Method for calibration of an encoder scale and a lithographic apparatus
A method for calibrating an encoder scale having an array of marks in a first direction, includes moving the encoder scale in the first direction relative to a first encoder-type sensor, a second encoder-type sensor and a third encoder-type sensor, wherein the first encoder-type sensor and the secon...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
28.03.2017
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Subjects | |
Online Access | Get full text |
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Summary: | A method for calibrating an encoder scale having an array of marks in a first direction, includes moving the encoder scale in the first direction relative to a first encoder-type sensor, a second encoder-type sensor and a third encoder-type sensor, wherein the first encoder-type sensor and the second encoder-type sensor are fixedly spaced in the first direction at a first distance relative to each other, wherein the second encoder-type sensor and the third encoder-type sensor are fixedly spaced in the first direction at a second distance relative to each other. |
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Bibliography: | Application Number: US201314430507 |