Devices and methods for determining vacuum pressure levels

A device is disclosed including a substrate; an infrared detector coupled to and thermally isolated from the substrate; and a heat shield coupled to the substrate by a plurality of contacts, the heat shield disposed above the infrared detector to block external thermal radiation from being received...

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Bibliographic Details
Main Author Kurth Eric A
Format Patent
LanguageEnglish
Published 28.03.2017
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
MEASURING QUANTITY OF HEAT
MEASURING TEMPERATURE
PHYSICS
RADIATION PYROMETRY
TESTING
TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES
TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Summary:A device is disclosed including a substrate; an infrared detector coupled to and thermally isolated from the substrate; and a heat shield coupled to the substrate by a plurality of contacts, the heat shield disposed above the infrared detector to block external thermal radiation from being received by the infrared detector. The heat shield is configured to receive a current through the contacts to heat the heat shield to a first temperature, and the infrared detector is configured to detect the first temperature and provide an output signal that is related to a vacuum pressure within the device. Methods for using and forming the device are also disclosed.
Bibliography:Application Number: US201314140747