Lithographic apparatus and contamination removal or prevention method
An immersion lithographic apparatus is cleaned by use of a cleaning liquid consisting essentially of ultra-pure water and (a) a mixture of hydrogen peroxide and ozone, or (b) hydrogen peroxide at a concentration of up to 5%, or (c) ozone at a concentration of up to 50 ppm, or (d) oxygen at concentra...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
21.03.2017
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Subjects | |
Online Access | Get full text |
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