X-ray detector and method of manufacturing the same
A method of manufacturing an X-ray detector includes: applying a mask having an opening on a substrate on which a plurality of charge detection units are positioned; filling the opening with a paste including a photoelectric conversion material that absorbs X-rays to generate charges; and forming a...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
14.02.2017
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Subjects | |
Online Access | Get full text |
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Summary: | A method of manufacturing an X-ray detector includes: applying a mask having an opening on a substrate on which a plurality of charge detection units are positioned; filling the opening with a paste including a photoelectric conversion material that absorbs X-rays to generate charges; and forming a photoconductive layer from the paste by separating the mask from the substrate. A thickness of the paste within the opening is thicker in an area adjacent to at least one edge among edges of the opening than in areas around other edges. |
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Bibliography: | Application Number: US201514704529 |