Method for manufacturing a semiconductor structure and semiconductor component comprising such a semiconductor structure
A method for manufacturing at least one semiconductor structure, and a component including a structure formed with the method, the method including: providing a substrate including at least one semiconductor silicon surface; forming an amorphous silicon carbide layer in contact with at least one par...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
31.01.2017
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Subjects | |
Online Access | Get full text |
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Summary: | A method for manufacturing at least one semiconductor structure, and a component including a structure formed with the method, the method including: providing a substrate including at least one semiconductor silicon surface; forming an amorphous silicon carbide layer in contact with at least one part of the semiconductor silicon surface; forming the at least one semiconductor structure in contact with the silicon carbide layer, the structure including at least one part, as a contact part, in contact with the surface of the silicon carbide layer, which includes gallium. |
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Bibliography: | Application Number: US201414898684 |