Partially dielectric isolated fin-shaped field effect transistor (FinFET)

• Main Authors: Divakaruni Ramachandra, Cheng Kangguo, Nowak Edward J, Faltermeier Johnathan E, Rim Kern
• Format: Patent
• Language: English
• Published: 03.01.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

One embodiment provides a method comprising etching a fin of a fin-shaped field effect transistor (FinFET) to form a reduced fin, and laterally etching the reduced fin to form a fin channel including a first fin channel sidewall and a second fin channel sidewall opposing the first fin channel sidewall. The method further comprises forming a first thin dielectric tunnel and a second thin dielectric tunnel on the first fin channel sidewall and the second fin channel sidewall, respectively. Each thin dielectric tunnel prevents lateral epitaxial crystal growth on the fin channel. The method further comprises etching an insulator layer disposed between the fin channel and a substrate of the FinFET to expose portions of a substrate surface of the substrate. A source epitaxy and a drain epitaxy are formed from vertical epitaxial crystal growth on the exposed portions of the substrate surface after epitaxial deposition.