Semiconductor device and method of fabricating the same
A semiconductor device includes a via structure having a top surface with a planar portion and a protrusion portion that is surrounded by the planar portion, and includes a conductive structure including a plurality of conductive lines contacting at least a part of the top surface of the via structu...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
27.12.2016
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Subjects | |
Online Access | Get full text |
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Summary: | A semiconductor device includes a via structure having a top surface with a planar portion and a protrusion portion that is surrounded by the planar portion, and includes a conductive structure including a plurality of conductive lines contacting at least a part of the top surface of the via structure. |
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Bibliography: | Application Number: US201314052691 |