Method for fabricating a magnetic recording device having a high aspect ratio structure

A method provides a magnetic write apparatus on a substrate. A mask is provided on a substrate. The mask has a trench therein. The trench has a top, a bottom and a plurality of sidewalls extending between the top and the bottom of the trench. The top of the trench is wider than the bottom. A protect...

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Bibliographic Details
Main Authors He Li, Wan Dujiang, Yi Ge, Wang Fujian, Zhou Jikou
Format Patent
LanguageEnglish
Published 27.12.2016
Subjects
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
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Summary:A method provides a magnetic write apparatus on a substrate. A mask is provided on a substrate. The mask has a trench therein. The trench has a top, a bottom and a plurality of sidewalls extending between the top and the bottom of the trench. The top of the trench is wider than the bottom. A protective layer is provided in the trench. The protective layer extends from the top of the trench along a first portion of the plurality of sidewalls such that the bottom of the trench and a second portion of the plurality of sidewalls are free of the protective layer. The structure is provided in a remaining portion of the trench.
Bibliography:Application Number: US201514750239