Method for manufacturing a porous glass film

A method for manufacturing an optical member provided with a porous glass film on the base member includes the steps of forming a glass powder film containing a glass powder on the base member, forming a phase-separable base material glass film on the base member by heating and fusing the glass powd...

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Bibliographic Details
Main Authors Sugiyama Akira, Takei Akiko, Zhang Zuyi, Koketsu Naoyuki, Takashima Kenji, Kotani Yoshinori
Format Patent
LanguageEnglish
Published 13.12.2016
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Summary:A method for manufacturing an optical member provided with a porous glass film on the base member includes the steps of forming a glass powder film containing a glass powder on the base member, forming a phase-separable base material glass film on the base member by heating and fusing the glass powder film in an atmosphere having an oxygen concentration of more than 20%, forming a phase-separated glass film on the base member by heating the base material glass film, and forming a porous glass film on the base member by subjecting the phase-separated glass film to an etching treatment.
Bibliography:Application Number: US201214358850