System of controlling diameter of single crystal ingot and single crystal ingot growing apparatus including the same
Provides are a system of controlling a diameter of a single crystal ingot and a single crystal ingot growing apparatus including the same. The system of controlling a diameter of a single crystal ingot includes: a diameter measuring sensor measuring a diameter of a single crystal ingot; a Low-Pass F...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
23.08.2016
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Subjects | |
Online Access | Get full text |
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Summary: | Provides are a system of controlling a diameter of a single crystal ingot and a single crystal ingot growing apparatus including the same. The system of controlling a diameter of a single crystal ingot includes: a diameter measuring sensor measuring a diameter of a single crystal ingot; a Low-Pass Filter (LPF) removing short period noise from measured data from the diameter measuring sensor; and an Automatic Diameter Control (ADC) sensor controlling the diameter of the single crystal ingot through controlling of a pull speed by using data having the noise removed as current data. |
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Bibliography: | Application Number: US201113306973 |