Method of forming a semiconductor structure including a ferroelectric material and semiconductor structure including a ferroelectric transistor

• Main Authors: Grasshoff Gunter, van Bentum Ralf
• Format: Patent
• Language: English
• Published: 09.08.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

An illustrative method disclosed herein includes providing a semiconductor structure. The semiconductor structure includes a logic transistor region, a ferroelectric transistor region and an input/output transistor region. A first protection layer is formed over the semiconductor structure. The first protection layer covers the logic transistor region and the input/output transistor region. At least a portion of the ferroelectric transistor region is not covered by the first protection layer. After the formation of the first protection layer, a ferroelectric transistor dielectric is deposited over the semiconductor structure, the ferroelectric transistor dielectric and the first protection layer are removed from the logic transistor region and the input/output transistor region, an input/output transistor dielectric is formed over the input/output transistor region and a logic transistor dielectric is formed over at least the logic transistor region.