Semiconductor device exhibiting reduced parasitics and method for making same

• Main Authors: DORIS BRUCE B, HON-WONG KEITH KWONG, CHENG KANGGUO
• Format: Patent
• Language: English
• Published: 01.03.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A semiconductor device includes a substrate and a gate stack disposed on the substrate. An upper layer of the gate stack is a metal gate conductor and a lower layer of the gate stack is a gate dielectric. A gate contact is in direct contact with the metal gate conductor.