Method and apparatus for providing a layout defining a structure to be patterned onto a substrate
A method provides a layout defining a structure to be patterned onto a substrate. The structure is registered with a predefined grid of the layout. The method includes locally stretching the grid in a first portion of a layout causing a problematic spot on the substrate.
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Main Author | |
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Format | Patent |
Language | English |
Published |
16.02.2016
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Subjects | |
Online Access | Get full text |
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Summary: | A method provides a layout defining a structure to be patterned onto a substrate. The structure is registered with a predefined grid of the layout. The method includes locally stretching the grid in a first portion of a layout causing a problematic spot on the substrate. |
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Bibliography: | Application Number: US201414246934 |