Integrated diode array and corresponding manufacturing method
An integrated diode array and a corresponding manufacturing method are provided. The integrated diode array includes a substrate having an upper side, and a plurality of blocks of several diodes, which are positioned in a planar manner and are suspended at the substrate above a cavity situated below...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
19.01.2016
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Subjects | |
Online Access | Get full text |
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Summary: | An integrated diode array and a corresponding manufacturing method are provided. The integrated diode array includes a substrate having an upper side, and a plurality of blocks of several diodes, which are positioned in a planar manner and are suspended at the substrate above a cavity situated below them in the substrate. The blocks are separated from one another by respective gaps, and within a specific block, the individual diodes are electrically insulated from one another by first STI trenches situated between them. |
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Bibliography: | Application Number: US201314049672 |