Micromechanical tunable Fabry-Perot interferometer, an intermediate product, and a method for producing the same

Controllable Fabry-Perot interferometers include two mirrors with a space between them. The mirrors are such that at least one layer is made of silicon-rich silicon nitride. Additionally, the mirrors' surfaces are formed to be of a roughness which reduces the risk of the mirrors sticking to eac...

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Bibliographic Details
Main Author BLOMBERG MARTTI
Format Patent
LanguageEnglish
Published 12.01.2016
Subjects
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
RADIATION PYROMETRY
TESTING
TRANSPORTING
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Summary:Controllable Fabry-Perot interferometers include two mirrors with a space between them. The mirrors are such that at least one layer is made of silicon-rich silicon nitride. Additionally, the mirrors' surfaces are formed to be of a roughness which reduces the risk of the mirrors sticking to each other.
Bibliography:Application Number: US201013319337