Micro-electro-mechanical switch beam construction with minimized beam distortion and method for constructing

Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to...

Full description

Saved in:
Bibliographic Details
Main Authors ELLIS DENIS, GOGGIN RAYMOND, FITZGERALD PADRAIG, WONG JO-EY, ECKL RICHARD TARIK
Format Patent
LanguageEnglish
Published 05.01.2016
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
RELAYS
SELECTORS
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.
Bibliography:Application Number: US201414150513