Super junction semiconductor device and method for manufacturing the same

• Main Authors: WOO HYUK, JUN KWANG YEON, CHOI CHANG YONG, CHO MOON SOO, KWON SOON TAK
• Format: Patent
• Language: English
• Published: 17.11.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

There is provided a super junction semiconductor device and a method of manufacturing the same. A super junction semiconductor device includes an n-type semiconductor region disposed in a substrate, two or more p-type semiconductor regions disposed adjacent to the n-type semiconductor region alterna...