Wiring board, semiconductor device, and method of manufacturing wiring board

A wiring board includes a first via hole in a first insulating layer to expose a first wiring layer. A first via in the first via hole includes an end surface. A second wiring layer is arranged on the first insulating layer and the end surface of the first via. A second insulating layer covers the s...

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Bibliographic Details
Main Authors ROKUGAWA AKIO, SHIMIZU NORIYOSHI, KOYAMA TOSHINORI
Format Patent
LanguageEnglish
Published 20.10.2015
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Summary:A wiring board includes a first via hole in a first insulating layer to expose a first wiring layer. A first via in the first via hole includes an end surface. A second wiring layer is arranged on the first insulating layer and the end surface of the first via. A second insulating layer covers the second wiring layer. A second via hole in the second insulating layer exposes the second wiring layer. A second via in the second via hole is arranged above the first via through the second wiring layer. The outer surface of the first insulating layer is lower in surface roughness than an inner surface of the first via hole.
Bibliography:Application Number: US201414317529