Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device

An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between th...

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Bibliographic Details
Main Authors AIDA YASUHIRO, KURACHI KATSUYUKI, MAEJIMA KAZUHIKO, SAKUMA HITOSHI
Format Patent
LanguageEnglish
Published 29.09.2015
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Summary:An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between the above-described pair of electrode layers, wherein the above-described piezoelectric layer is provided with at least one layer each of first piezoelectric layer which is a potassium-sodium niobate thin film substantially not containing Mn (manganese) and second piezoelectric layer which is a potassium-sodium niobate thin film containing Mn.
Bibliography:Application Number: US201213687785