Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device
An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between th...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
29.09.2015
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Subjects | |
Online Access | Get full text |
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Summary: | An object is to reduce the leakage current of a piezoelectric element including a potassium-sodium niobate thin film, enhance the reliability of the piezoelectric element and, in addition, enhance the withstand voltage by including a pair of electrodes and a piezoelectric layer sandwiched between the above-described pair of electrode layers, wherein the above-described piezoelectric layer is provided with at least one layer each of first piezoelectric layer which is a potassium-sodium niobate thin film substantially not containing Mn (manganese) and second piezoelectric layer which is a potassium-sodium niobate thin film containing Mn. |
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Bibliography: | Application Number: US201213687785 |