Deformable mirror with capacitive sensors

The invention relates to a deformable mirror (1) comprising a deformable reflector member (2) possessing a reflecting surface (3), at least one actuator (6) suitable for driving said reflector member (2) to move substantially along a deformation direction (XX′) so as to be capable of deforming the r...

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Bibliographic Details
Main Authors CHARTON JULIEN GÉRARD ERNEST, BARRAULT MICHEL RAYMOND, ROOMS FRÉDÉRIC CHRISTIAN ROBERT
Format Patent
LanguageEnglish
Published 11.08.2015
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:The invention relates to a deformable mirror (1) comprising a deformable reflector member (2) possessing a reflecting surface (3), at least one actuator (6) suitable for driving said reflector member (2) to move substantially along a deformation direction (XX′) so as to be capable of deforming the reflecting surface (3), and at least one position sensor (14) arranged in the interstitial space (12) lying between the reflecting surface (3) and the widest cross-section (S6MAX) of the actuator (6), on an intermediate reference support (11), in such a manner as to be capable of evaluating the position of the reflecting surface (3), the sensor (14) occupying a cross-section (S14) transversely to the deformation direction that, in projection along said deformation direction (XX′), presents at least one overlap zone (SR) with the widest cross-section of the actuator (S6MAX). Such deformable mirrors are suitable for use in adaptive optics.
Bibliography:Application Number: US201213981654