Target material refinement device and target supply apparatus

A target material refinement device may include a refinement tank to accommodate a target material, a heating section to heat the interior of the refinement tank, and an oxygen-atom removing section to remove oxygen atoms present in the target material.

Saved in:
Bibliographic Details
Main Authors WAKABAYASHI OSAMU, SHIRAISHI YUTAKA
Format Patent
LanguageEnglish
Published 26.05.2015
Subjects
CHEMISTRY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FERROUS OR NON-FERROUS ALLOYS
METALLURGY
PRETREATMENT OF RAW MATERIALS
PRODUCTION AND REFINING OF METALS
TREATMENT OF ALLOYS OR NON-FERROUS METALS
X-RAY TECHNIQUE
Online AccessGet full text

Cover

More Information
Summary:A target material refinement device may include a refinement tank to accommodate a target material, a heating section to heat the interior of the refinement tank, and an oxygen-atom removing section to remove oxygen atoms present in the target material.
Bibliography:Application Number: US201313770939