System and method for transport
A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.
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Main Author | |
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Format | Patent |
Language | English |
Published |
28.04.2015
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Subjects | |
Online Access | Get full text |
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Summary: | A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source. |
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Bibliography: | Application Number: US20070692667 |