Altering capacitance of MIM capacitor having reactive layer therein
Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
21.04.2015
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Subjects | |
Online Access | Get full text |
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Summary: | Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor. |
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Bibliography: | Application Number: US201213716731 |