Altering capacitance of MIM capacitor having reactive layer therein

Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive...

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Bibliographic Details
Main Authors STAMPER ANTHONY K, EDELSTEIN DANIEL C
Format Patent
LanguageEnglish
Published 21.04.2015
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Summary:Embodiments of a method include forming a metal-insulator-metal (MIM) capacitor including a first electrode and a second electrode and an insulator layer between the first and second electrodes, the MIM capacitor also including a reactive layer; and altering the reactive layer to change a capacitive value of the MIM capacitor.
Bibliography:Application Number: US201213716731