Current limiting device for plasma power supply

The current (Iout) flowing between a plasma chamber and a power supply is limited by limiting the current change di/dt if the current exceeds a predetermined current. A current change limiting device is provided in the current path between the power supply and the plasma chamber and is configured to...

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Bibliographic Details
Main Authors BUGYI RAFAL, KLIMCZAK ANDRZEJ, OZIMEK PAWEL
Format Patent
LanguageEnglish
Published 17.03.2015
Subjects
BASIC ELECTRIC ELEMENTS
CONTROLLING
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
GENERATION
PHYSICS
REGULATING
SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
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Summary:The current (Iout) flowing between a plasma chamber and a power supply is limited by limiting the current change di/dt if the current exceeds a predetermined current. A current change limiting device is provided in the current path between the power supply and the plasma chamber and is configured to determine if the current exceeds the predetermined current and limits the current change.
Bibliography:Application Number: US20080339801