Replacement gate MOSFET with a high performance gate electrode
In a replacement gate scheme, a continuous material layer is deposited on a bottom surface and a sidewall surface in a gate cavity. A vertical portion of the continuous material layer is removed to form a gate component of which a vertical portion does not extend to a top of the gate cavity. The gat...
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Main Authors | , , , , , , , , |
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Format | Patent |
Language | English |
Published |
03.03.2015
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Subjects | |
Online Access | Get full text |
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Summary: | In a replacement gate scheme, a continuous material layer is deposited on a bottom surface and a sidewall surface in a gate cavity. A vertical portion of the continuous material layer is removed to form a gate component of which a vertical portion does not extend to a top of the gate cavity. The gate component can be employed as a gate dielectric or a work function metal portion to form a gate structure that enhances performance of a replacement gate field effect transistor. |
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Bibliography: | Application Number: US201313780877 |