Illumination system for a microlithgraphic exposure apparatus
An illumination system of a microlithographic exposure apparatus comprises a condenser for transforming a pupil plane into a field plane. The condenser has a lens group that contains a plurality of consecutive lenses. These lenses are arranged such that a light bundle focused by the condenser on an...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
28.10.2014
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Subjects | |
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Abstract | An illumination system of a microlithographic exposure apparatus comprises a condenser for transforming a pupil plane into a field plane. The condenser has a lens group that contains a plurality of consecutive lenses. These lenses are arranged such that a light bundle focused by the condenser on an on-axis field point converges within each lens of the lens group. At least one lens of the lens group has a concave surface. The illumination system may further comprise a field stop objective that at least partly corrects a residual pupil aberration of the condenser. |
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AbstractList | An illumination system of a microlithographic exposure apparatus comprises a condenser for transforming a pupil plane into a field plane. The condenser has a lens group that contains a plurality of consecutive lenses. These lenses are arranged such that a light bundle focused by the condenser on an on-axis field point converges within each lens of the lens group. At least one lens of the lens group has a concave surface. The illumination system may further comprise a field stop objective that at least partly corrects a residual pupil aberration of the condenser. |
Author | SOHMER ALEXANDER FUERTER GERHARD FELDMANN HEIKO EGGER RAFAEL MOEGELE ARTUR RAUM MICHAEL DODOC AURELIAN ULRICH WILHELM |
Author_xml | – fullname: FUERTER GERHARD – fullname: DODOC AURELIAN – fullname: ULRICH WILHELM – fullname: EGGER RAFAEL – fullname: MOEGELE ARTUR – fullname: RAUM MICHAEL – fullname: FELDMANN HEIKO – fullname: SOHMER ALEXANDER |
BookMark | eNqNyjsOwjAMANAMMPC7gy_AUCpEFxYQCGZgrqzIbSMlthUnEtyehQMwveUt3YyFaeGO9xhrCowlCIN9rFCCQTIgpOCzxFCmMaNOwQO9VaxmAlTFjKXa2s0HjEabnysH18vzfNuSSk-m6Imp9K9H1x3aZt-cdu0f5Qs9RTKt |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences Physics |
ExternalDocumentID | US8873151B2 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US8873151B23 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 12:09:43 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US8873151B23 |
Notes | Application Number: US20060911904 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20141028&DB=EPODOC&CC=US&NR=8873151B2 |
ParticipantIDs | epo_espacenet_US8873151B2 |
PublicationCentury | 2000 |
PublicationDate | 20141028 |
PublicationDateYYYYMMDD | 2014-10-28 |
PublicationDate_xml | – month: 10 year: 2014 text: 20141028 day: 28 |
PublicationDecade | 2010 |
PublicationYear | 2014 |
RelatedCompanies | SOHMER ALEXANDER FUERTER GERHARD CARL ZEISS SMT GMBH FELDMANN HEIKO EGGER RAFAEL MOEGELE ARTUR RAUM MICHAEL DODOC AURELIAN ULRICH WILHELM |
RelatedCompanies_xml | – name: MOEGELE ARTUR – name: FUERTER GERHARD – name: FELDMANN HEIKO – name: SOHMER ALEXANDER – name: DODOC AURELIAN – name: RAUM MICHAEL – name: CARL ZEISS SMT GMBH – name: ULRICH WILHELM – name: EGGER RAFAEL |
Score | 2.9630816 |
Snippet | An illumination system of a microlithographic exposure apparatus comprises a condenser for transforming a pupil plane into a field plane. The condenser has a... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
Title | Illumination system for a microlithgraphic exposure apparatus |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20141028&DB=EPODOC&locale=&CC=US&NR=8873151B2 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT4NAEJ409XlT1Fhf2YPhRrQsIB6ICVBSTWwbW0xvDbsskYNAhEZ_vrNbWr3odXaz2Z1knjvzDcA1TVnfZRkzbGZyw8owYMWd1KCpKahNZTOjQvscOcPYeprb8w7k614YhRP6qcARUaI4ynuj9HX1k8QKVW1lfcNyJJUP0cwL9TY6lkWLpquHvjeYjMNxoAeBF0_10YuHskTRuPmorbekFy1h9gevvmxKqX5blOgAtid4WNEcQkcUGuwF68FrGuw-t__dGuyoAk1eI7EVwvoIvEc5nThfpfHICoqZoO9JEvIuy-vQsX5TONQ5J-KrKmUOkCSVAvle1sdAosEsGBp4o8Xm9Yt4urk7PYFuURbiFEji8JQLN7Mcdm9RNDB9jESYe2uzVIi7TPSg9-cxZ_-sncO-ZKPUzqZ7Ad3mYyku0ew27Eox7Bu1IokH |
link.rule.ids | 230,309,786,891,25594,76903 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LT4NAEJ409VFvWjXW5x4MN6JlgeKBmAAlVPuKbU1vTReWyEEgQqM_39ktrV70urvZzG4yj2925luAWxqxtsViphpMC1U9RsCKK6lKI41Tg4pmRsn2OTSDmf40N-Y1SDa9MJIn9FOSI6JGhajvpbTX-U8Sy5O1lcUdS3Aoe_SntqdU6FgULWqW4jl2dzzyRq7iuvZsogxfbNQlis7NQWu900FEKJHSqyOaUvLfHsU_hN0xbpaWR1DjaRMa7ubjtSbsD6r37ibsyQLNsMDBSgmLY7B74nfiZJ3GI2sqZoKxJ1mSd1Feh4H1m-ShTkLCv_JM5ADJMpck36viBIjfnbqBihIttqdfzCZb2ekp1NMs5WdAlmYYhdyKdZM96BQdTBuRCLPuDRZx3ol5C1p_bnP-z9wNNILpoL_o94bPF3AgrlRYas26hHr5seJX6IJLdi0v7xtCo4vx |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Illumination+system+for+a+microlithgraphic+exposure+apparatus&rft.inventor=FUERTER+GERHARD&rft.inventor=DODOC+AURELIAN&rft.inventor=ULRICH+WILHELM&rft.inventor=EGGER+RAFAEL&rft.inventor=MOEGELE+ARTUR&rft.inventor=RAUM+MICHAEL&rft.inventor=FELDMANN+HEIKO&rft.inventor=SOHMER+ALEXANDER&rft.date=2014-10-28&rft.externalDBID=B2&rft.externalDocID=US8873151B2 |