MEMS particle sorting actuator and method of manufacturing

• Main Authors: GRUMMITT DARYL W, FOSTER JOHN S, SPONG JAQUELIN K, TURNER KIMBERLY L, HARLEY JOHN C
• Format: Patent
• Language: English
• Published: 28.10.2014
• Subjects: APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY; BEER; BIOCHEMISTRY; CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE; CHEMISTRY; ENZYMOLOGY; METALLURGY; MICROBIOLOGY; MUTATION OR GENETIC ENGINEERING; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SPIRITS; TRANSPORTING; VINEGAR; WINE

A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on on...