MEMS particle sorting actuator and method of manufacturing

A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on on...

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Bibliographic Details
Main Authors GRUMMITT DARYL W, FOSTER JOHN S, SPONG JAQUELIN K, TURNER KIMBERLY L, HARLEY JOHN C
Format Patent
LanguageEnglish
Published 28.10.2014
Subjects
APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY
BEER
BIOCHEMISTRY
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
CHEMISTRY
ENZYMOLOGY
METALLURGY
MICROBIOLOGY
MUTATION OR GENETIC ENGINEERING
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SPIRITS
TRANSPORTING
VINEGAR
WINE
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Summary:A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.
Bibliography:Application Number: US201213374898