Multi-component deposition

Ion-enhanced physical vapor deposition is augmented by sputtering to deposit multi-component materials. The process may be used to deposit coatings and repair material on Ti alloy turbine engine parts. The physical vapor deposition may be ion-enhanced electron beam physical vapor deposition.

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Bibliographic Details
Main Authors MEMMEN ROBERT L, KUZMICHEV ANATOLY I, BELOUSOV IGOR V, BIBER VLADIMIR
Format Patent
LanguageEnglish
Published 21.10.2014
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Summary:Ion-enhanced physical vapor deposition is augmented by sputtering to deposit multi-component materials. The process may be used to deposit coatings and repair material on Ti alloy turbine engine parts. The physical vapor deposition may be ion-enhanced electron beam physical vapor deposition.
Bibliography:Application Number: US20090582560