Bare aluminum baffles for resist stripping chambers
Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.
Saved in:
Main Authors | , , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
14.10.2014
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer. |
---|---|
Bibliography: | Application Number: US201213665225 |