Substrate backing device and substrate thermocompression-bonding device
A substrate backing device places and holds a rigid substrate thereon and receives, from therebelow, a pressing force during operations for thermocompressively bonding a flexible substrate thereto. The substrate backing device includes a plate-shaped backing plate provided with a backing support sur...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
07.10.2014
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Subjects | |
Online Access | Get full text |
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