Electrostatic chuck

An electrostatic chuck for manufacturing a flat panel display is disclosed. In one embodiment, the electrostatic chuck includes i) a base substrate, ii) an insulating layer formed on the base substrate and iii) a conductive layer formed on the insulating layer and electrically connected to a power d...

Full description

Saved in:
Bibliographic Details
Main Author DOH SUNG-WON
Format Patent
LanguageEnglish
Published 30.09.2014
Subjects
BASIC ELECTRIC ELEMENTS
CORONA DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
OVERVOLTAGE ARRESTERS USING SPARK GAPS
SEMICONDUCTOR DEVICES
SPARK GAPS
SPARKING PLUGS
Online AccessGet full text

Cover

More Information
Summary:An electrostatic chuck for manufacturing a flat panel display is disclosed. In one embodiment, the electrostatic chuck includes i) a base substrate, ii) an insulating layer formed on the base substrate and iii) a conductive layer formed on the insulating layer and electrically connected to a power device. The electrostatic chuck further includes a dielectric layer formed on the conductive layer and including an emboss part and a trench part surrounding the emboss part. The emboss part comprises a plurality of contact parts and at least one protrusion. The trench part includes at least one channel. The contact parts and the protrusion have different shapes. The electrostatic chuck further includes a cooling gas line extending through the base substrate, the insulating layer, the conductive layer, and the dielectric layer.
Bibliography:Application Number: US201113251096