Liquid ejecting head and liquid ejecting apparatus
A liquid ejecting head includes a flow channel forming substrate made of silicon and having pressure generating chambers that communicate with nozzles through which liquid is ejected, a piezoelectric elements that is disposed on the flow channel forming substrate so as to oppose the pressure generat...
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Main Author | |
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Format | Patent |
Language | English |
Published |
05.08.2014
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Subjects | |
Online Access | Get full text |
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Summary: | A liquid ejecting head includes a flow channel forming substrate made of silicon and having pressure generating chambers that communicate with nozzles through which liquid is ejected, a piezoelectric elements that is disposed on the flow channel forming substrate so as to oppose the pressure generating chambers and varies a pressure of a liquid in the pressure generating chambers, and a protective substrate which has a holding section that houses the pressure generating unit and is bonded to a side of the flow channel forming substrate where the pressure generating unit is disposed, and the flow channel member is made of silicon and is provided with a thermistor that is disposed on a side of the flow channel member opposite to the flow channel forming substrate. |
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Bibliography: | Application Number: US201213426504 |