Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head includes a flow channel forming substrate made of silicon and having pressure generating chambers that communicate with nozzles through which liquid is ejected, a piezoelectric elements that is disposed on the flow channel forming substrate so as to oppose the pressure generat...

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Bibliographic Details
Main Author OWAKI HIROSHIGE
Format Patent
LanguageEnglish
Published 05.08.2014
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Summary:A liquid ejecting head includes a flow channel forming substrate made of silicon and having pressure generating chambers that communicate with nozzles through which liquid is ejected, a piezoelectric elements that is disposed on the flow channel forming substrate so as to oppose the pressure generating chambers and varies a pressure of a liquid in the pressure generating chambers, and a protective substrate which has a holding section that houses the pressure generating unit and is bonded to a side of the flow channel forming substrate where the pressure generating unit is disposed, and the flow channel member is made of silicon and is provided with a thermistor that is disposed on a side of the flow channel member opposite to the flow channel forming substrate.
Bibliography:Application Number: US201213426504