Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sample

An ion beam machining and observation method relevant to a technique of cross sectional observation of an electronic component, through which a sample is machined by using an ion beam and a charged particle beam processor capable of reducing the time it takes to fill up a processed hole with a high...

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Bibliographic Details
Main Authors ISHIGURO KOJI, SHICHI HIROYASU, TOMIMATSU SATOSHI, KANEOKA NORIYUKI, UMEMURA KAORU
Format Patent
LanguageEnglish
Published 15.07.2014
Subjects
CONVERSION OF CHEMICAL ELEMENTS
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
RADIOACTIVE SOURCES
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Summary:An ion beam machining and observation method relevant to a technique of cross sectional observation of an electronic component, through which a sample is machined by using an ion beam and a charged particle beam processor capable of reducing the time it takes to fill up a processed hole with a high degree of flatness at the filled area. The observation device is capable of switching the kind of gas ion beam used for machining a sample with the kind of a gas ion beam used for observing the sample. To implement the switch between the kind of a gas ion beam used for sample machining and the kind of a gas ion beam used for sample observation, at least two gas introduction systems are used, each system having a gas cylinder, a gas tube, a gas volume control valve, and a stop valve.
Bibliography:Application Number: US201313926352