Off-axis imaging for indentation instruments

Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down or slightly angled optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample...

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Bibliographic Details
Main Author BONIN WAYNE ALLEN
Format Patent
LanguageEnglish
Published 13.05.2014
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Summary:Modifications to the indenter probe tips and transducer, and proper selection of optics in an indentation system allow straight down or slightly angled optical viewing of the sample surface under the indentation tip by a microscope, by providing an optical path through the transducer from the sample surface under the tip to a microscope objective, thereby simplifying alignment of the tip to features on the sample.
Bibliography:Application Number: US20100655935