Process for producing capacitive electromechanical conversion device, and capacitive electromechanical conversion device

• Main Authors: EZAKI TAKAHIRO, SOEDA YASUHIRO
• Format: Patent
• Language: English
• Published: 04.03.2014
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; FOR PERFORMING MECHANICAL WORK IN GENERAL; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASURING; METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY; PERFORMING OPERATIONS; PHYSICS; RADIO DIRECTION-FINDING; RADIO NAVIGATION; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TESTING; TRANSPORTING

A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.