Wafer center finding with kalman filter

A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder d...

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Bibliographic Details
Main Authors KILEY CHRISTOPHER C, FOGEL PAUL E, VAN DER MEULEN PETER, BUZAN FORREST T
Format Patent
LanguageEnglish
Published 21.01.2014
Subjects
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
CONVEYING
COUNTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
HANDLING RECORD CARRIERS
HANDLING THIN OR FILAMENTARY MATERIAL
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PACKING
PERFORMING OPERATIONS
PHYSICS
PNEUMATIC TUBE CONVEYORS
PRESENTATION OF DATA
RECOGNITION OF DATA
RECORD CARRIERS
REGULATING
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TECHNICAL SUBJECTS COVERED BY FORMER USPC
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:A device is provided having a robotic arm for handling a wafer, the robotic arm including one or more encoders that provide encoder data identifying a position of one or more components of the robotic arm. The device also having a processor adapted to apply an extended Kalman Filter to the encoder data to estimate a position of the wafer.
Bibliography:Application Number: US201213617333